CIS 6930.3753X Spr.'02
Readings for Part III: 
The Future of Semiconductor Technology

Continue following the general advice on reading assignments from the first readings page.

Index to the below:


Lecture 11:  The basics of semiconductor technology:

This lecture will be an overview of the basic concepts, structures, and processes of semiconductor technology, for the benefit of those students who may not already be familiar with it. This is a more detailed technical discussion of the physics of semiconductor MOSFET transistors. If you find you need more background reading on this subject than the above, let me know and I can try to refer you to library books and other resources.  Also, if you already know this subject area and can recommend a good short introductory article to distribute to the class, I would appreciate a suggestion.


Lecture 12: Semiconductor technology trends, scaling laws, & roadmap.

This next article by Meindl is an excellent survey of the constraints that come into play at many levels - from low-level physics to systems issues - that may impact further scaling of semiconductor technology over the next few decades. See first-hand for yourself what the international semiconductor industry is planning to accomplish over the next 14 years: Other misc. references:


Lecture 13: Fundamental & engineering limits to semiconductor scaling.

The remaining readings are the same as for lecture 12.


Lecture 14: Limits to energy efficiency of irreversible electronics.

The remaining readings are the same as for lecture 12.


Extra material: Future semiconductor structures.

Advanced Semiconductor Device Structures

SOI, double-gate FETs, quantum dots and related structures.

  • Xuejue Huang et al, "Sub 50-nm FinFET: PMOS", International Electron Devices Meeting 1999, PDF@http://www-inst.EECS.Berkeley.EDU/~xuejue/iedm-paper-new.pdf.Advanced Cooling Systems for Use With Semiconductor Technology
  • Use of liquid coolant, thermoelectrics, heat pipes...  Need more articles....